• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    It has a surface wave line 11 that excites surface waves by high frequency, and the surface wave line 11 is made of a conductive material having a pleat 14 having a periodic structure, and is free of surface waves generated near the surface wave line 11. By using the electrodeless discharge energy supply device for supplying the energy required for electrode discharge to the electrodeless discharge tube 12, relatively uniform high frequency energy can be applied to the planar or linear discharge space, thereby producing more uniform discharge. have.
    公开号:KR20010012617A
    申请号:KR1019997010577
    申请日:1999-03-11
    公开日:2001-02-26
    发明作者:호치아키라；다케다마모루；사키야마가즈유키
    申请人:마츠시타 덴끼 산교 가부시키가이샤；
    IPC主号:
    专利说明:

    ELECTRODELESS DISCHARGE ENERGY SUPPLY APPARATUS AND ELECTRODELESS DISCHARGE LAMP DEVICE}
    The high frequency electrodeless discharge lamp has an excellent advantage in that it is easier to combine electron energy with the filler, reduce mercury in the filler for discharge light emission, and can expect high luminous efficiency than the electrode arc discharge lamp. In addition, since there is no electrode in the discharge space, blackening of the inner wall of the valve due to electrode evaporation does not occur. As a result, it is possible to significantly increase the lamp life. From these characteristics, high frequency electrodeless discharge lamps are the next generation of discharge lamps.
    As a means for supplying high frequency energy required for an electrodeless discharge, a cavity resonator described in Japanese Patent Laid-Open No. 59-86153 is known.
    FIG. 14 is a view of the electrodeless discharge lamp apparatus using the electrodeless discharge energy supply device of the conventional cavity resonator disclosed in Japanese Unexamined Patent Publication No. 59-86153, "Microwave Generating Electrodeless Lamp for Producing High Brightness." The structure is shown.
    An electrodeless discharge lamp 131 in which a discharge medium such as a rare gas or a metal is sealed inside a light transmissive member such as quartz glass is disposed inside the cavity resonator 132 made of a metal conductor. The high frequency energy generated from the oscillator such as the magnetron is propagated through the waveguide and the like and is coupled to the cavity resonator 132 by the high frequency coupling slot 133. A resonance standing wave is generated inside the cavity resonator 132, and a discharge plasma is generated inside the electrodeless discharge lamp 131 by the energy of the resonance standing wave. Radiated light generated from the electrodeless discharge lamp is drawn out to the outside through the metal net provided in the opening 134.
    In the conventional electrodeless discharge energy supply device and the electrodeless discharge lamp device, since the cavity resonator is used as the energy supply device, the electric field intensity distribution based on the in-tube wavelength is generated in the cavity resonator. For example, at 2.45 GHz, which is widely used as an industrial frequency band, the free space wavelength is about 12 cm. Therefore, when the conventional apparatus is used to generate a discharge in a discharge region wider than the half-wavelength (about 6 cm), the strength of the electric field strength varies greatly depending on the place in the discharge region. For this reason, there is a problem that the discharge intensity varies depending on the place in the discharge area, and thus a uniform discharge cannot be obtained. Therefore, such a conventional device is not suitable for applications such as planar light sources and linear light sources, which require uniform discharge in a wide discharge region compared to the high frequency wavelength to be applied.
    In the electrodeless discharge energy supply device, there is a demand for development of an electrodeless discharge energy supply device capable of generating a discharge even in a discharge area wider than a high frequency wavelength to be applied, and applying a uniform electric field to a desired discharge area. .
    The present invention relates to an electrodeless discharge energy supply device for supplying high frequency energy required for electrodeless discharge and an electrodeless discharge lamp device using the same.
    1 is a perspective view showing an electrodeless discharge energy supply apparatus using a flat plate wrinkled surface wave line according to a first embodiment of the present invention.
    Fig. 2 is a cross sectional view of an electrodeless discharge lamp apparatus using a flat plate wrinkled surface wave line according to a first embodiment of the present invention.
    Fig. 3 is a cross sectional view of an electrodeless discharge energy supply device using a plate-pleated surface wave line according to a first embodiment of the present invention.
    4 is a perspective view showing an electrodeless discharge energy supply apparatus using a flat plate wrinkled surface wave line according to a first embodiment of the present invention.
    Fig. 5 is a perspective view showing an electrodeless discharge energy supply apparatus using a stub type surface wave line according to the first embodiment of the present invention.
    Fig. 6 is a perspective view showing an interdigital surface wave line according to the first embodiment of the present invention.
    Fig. 7 is a perspective view showing a flat spiral surface wave line according to the first embodiment of the present invention.
    8 is a perspective view showing an interdigital surface wave line according to a second embodiment of the present invention.
    Fig. 9 is a perspective view of a case where an electrodeless discharge tube is provided on an interdigital surface wave line according to a second embodiment of the present invention.
    Fig. 10 is a perspective view showing a flat spiral surface wave line according to a second embodiment of the present invention.
    Fig. 11 is a perspective view showing an electrodeless discharge energy supply device using a semi-cylindrical surface wave line according to a third embodiment of the present invention.
    12 is a cross-sectional view of the electrodeless discharge energy supply apparatus using the semi-cylindrical surface wave line according to the third embodiment of the present invention.
    Fig. 13 is a perspective view showing the electrodeless discharge energy supply apparatus using the cylindrical spiral surface wave line according to the third embodiment of the present invention.
    14 is a perspective view showing an electrodeless discharge energy supply apparatus using a conventional cavity resonator.
    Explanation of symbols on the main parts of the drawings
    11, 21: Flat wrinkled surface wave line
    12, 22, 42, 102, 112, 131: electrodeless discharge tube
    51: stub surface wave line
    61, 81: Interdigital surface wave line
    72, 91: flat spiral surface wave track
    83, 93: dielectric substrate
    101, 111: semi-cylindrical surface wave track
    121: cylindrical spiral surface wave line
    Disclosure of Invention According to the present invention, the electrodeless discharge energy supply device and the electrodeless using the same, which can generate a more uniform discharge in a wider discharge area than the high frequency wavelength applied compared to the conventional cavity resonator, in consideration of the problems of the conventional energy supply device. An object of the present invention is to provide a discharge lamp device.
    The invention of claim 1 has a predetermined periodic structure and includes an excitation means for exciting surface waves by high frequency,
    An electrodeless discharge energy supply device for supplying energy required for an electrodeless discharge by the excited surface waves.
    According to a second aspect of the present invention, the excitation means is conductive and is a substantially flat surface wave line.
    The surface wave supplied as the energy is the electrodeless discharge energy supply device of the first aspect of the present invention, which is a surface wave generated near the surface wave line.
    According to the invention of claim 5, the excitation means comprises: (1) a flat plate plate using a dielectric material, and (2) a surface wave line formed using a conductive material on the substrate,
    The surface wave supplied as the energy is the electrodeless discharge energy supply device of the first aspect of the present invention, which is a surface wave generated near the surface wave line.
    The invention according to claim 9, wherein the excitation means is conductive, is a substantially cylindrical or semi-cylindrical surface wave line,
    The surface wave supplied as the energy is the electrodeless discharge energy supply device of the first aspect of the present invention, which is a surface wave generated near the surface wave line.
    Thus, for example, a more uniform high frequency electric field can be applied to the planar or linear discharge space.
    The invention of claim 15 is a high frequency oscillation means for generating high frequency energy;
    High frequency propagation means for propagating the generated high frequency energy;
    The electrodeless discharge energy supply device according to any one of the present invention,
    High frequency coupling means for coupling the propagated high frequency energy to the electrodeless discharge energy supply device;
    An electrodeless discharge lamp comprising an electrodeless discharge lamp for discharging by surface waves generated by the electrodeless discharge energy supply device.
    This makes it possible to realize a planar or linear light source with a more uniform luminance distribution, for example, in a discharge region wider than the wavelength of the high frequency applied.
    In addition, in this specification, "high frequency" refers to the electromagnetic wave of the frequency of 1 MHz-100 GHz. In particular, in the "microwave" frequency in the frequency range of 300MHz to 30GHz, the present invention can obtain an appropriate effect.
    Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 to 10.
    (First embodiment)
    1 shows a perspective view of an electrodeless discharge energy supply device using a flat corrugated surface wave line, wherein 11 is a flat wrinkled surface wave line. The flat wrinkled surface wave line 11 has a periodic structure in which a plurality of corrugations 14 made of the same conductive material are periodically arranged substantially vertically on a flat plate 13 made of a conductive material such as copper or aluminum metal.
    In such a periodic structure of the plate-like surface wave line 11, when high frequency energy of a desired frequency is applied from the coupling antenna (see 26 in FIG. 2), the upper end 14a of each corrugation 14 and its vicinity are provided. Each dimension is designed so that the surface wave is excited and propagates in parallel with the flat plate 13 and in the pleats 14 and in the vertical direction (the arrow direction with the letter A in Fig. 1).
    A flat electrodeless discharge tube 12 containing a rare gas, a metal, or a discharge medium is provided near the upper end portion of the flat wrinkled surface wave line 11 so that the flat wave free electric field is generated by the electric wave of the surface wave generated at the upper end portion 14a. Electrode discharge may occur. Such discharge may be generated in the entire interior of the electrodeless discharge tube 12 due to the type of the discharge medium encapsulated, the sealing conditions, or the like, or may be generated inside the electrodeless discharge tube 12 or near the surface wave line 11. You can also The electrodeless discharge tube 12 is made of quartz glass or the like.
    FIG. 2 is a cross-sectional view of an electrodeless discharge lamp device using the electrodeless discharge energy supply device by the flat-pleated surface wave line shown in FIG.
    As shown in FIG. 2, the high frequency energy oscillated from the high frequency oscillation means 23, such as a magnetron, propagates through the high frequency wave propagation means 24, such as a waveguide or coaxial, and is made by the high frequency coupling means 26, such as a loop antenna. It is coupled to the plate wrinkle surface wave line (21). The electric field of the surface wave excited on the flat-plate surface wave line 21 is coupled to the electrodeless discharge lamp 22, and supplies energy required for the electrodeless discharge. Radiated light generated from the electrodeless discharge lamp 22 is led out through a light-transmitting high frequency leakage preventing means 25 made of a metal mesh. In the flat wrinkled surface wave line, the flat plate portion 13 of FIG. 1 also serves as a high frequency leakage preventing means on the side opposite to the light transmitting portion. As a result, the electrodeless discharge can be obtained inside the electrodeless discharge lamp 22, thereby realizing a planar light source with a relatively uniform luminance distribution.
    Next, the electric field intensity distribution of the flat plate type surface wave line 11 will be described with reference to FIG. 3.
    The main period of the periodic structure is L, the interval between the wrinkles 14 is d, and the height of the wrinkles 14 is h. 3, the position of the upper end 14a of the corrugation 14 is set to y = 0 using the x-y-z coordinate system. In addition, the x-axis is in the forward direction toward the front with respect to the ground. In addition, for the sake of simplicity, the plate-like surface wave line 11 is made of an ideal conductor material without electric resistance.
    When a hayeoteul folds the high frequency voltage V between 14 and folds 14 is, considering in the field of high-frequency electric field going to spread in the z-direction as a surface wave in the x-direction the same TM mode electric field E Z of the z-direction, and then It is expressed as in Equation 1 below.
    In this way, the electric field periodically changes its direction in the z direction, and has an exponentially decreasing distribution as it falls from the upper end portion 14a toward the y direction. Β n is the phase constant of the nth spatial harmonic, and the eigenvalue n is represented by the following equation (2) using the wave number k.
    In the case of the structure in which the conductive shield (corresponding to the high frequency leakage preventing means 25 shown in Fig. 2) is installed at the position of y = b, the electric field E Z in the z direction of the nth spatial harmonic is It is shown together.
    When such a shield 25 is provided, the distribution of the electric field in the y direction changes, but the surface wave propagates in the z direction similarly to the case where the shield 25 is not provided.
    In addition, when discharge occurs, the impedance component of the discharge plasma also affects and propagates more complicatedly. In order to obtain sufficient impedance matching from the power supply side, it is desirable to determine the optimal dimensional value experimentally.
    In addition, although the flat electrodeless discharge lamp which has a single discharge space as an electrodeless discharge tube is shown here, the shape of an electrodeless discharge tube is not limited to this. For example, as shown in Fig. 4, even when using a configuration in which a plurality of columnar electrodeless discharge tubes 42 are arranged in a planar shape near the upper end of the flat wrinkled surface wave line 11, the electrodeless electrode having a substantially planar shape by surface waves is similarly used. Discharge can be obtained.
    In addition, the surface wave line which excites surface wave by a high frequency is not limited to the flat plate type surface wave line demonstrated above. 5 to 7 show examples of other surface wave lines.
    5 is a perspective view of the stub type surface wave line 51.
    As shown in Fig. 5, the stub-type surface wave line 51 has a structure in which a plurality of rod-shaped members (stubs) 53 made of the same conductive material are periodically provided on the flat plate 52 made of the conductive material. By properly designing the dimensions of the periodic structure so that the surface wave is excited and propagated at the upper end of the stub 53, a flat electrodeless discharge can be similarly realized by providing an electrodeless discharge tube near the upper end of the stub 53. In addition, although the cylindrical member is shown as a rod-shaped member in FIG. 5, the same effect can be acquired also in other forms, such as a rod-shaped flat plate.
    6 is a perspective view of the interdigital surface wave line 61.
    As shown in FIG. 6, the interdigital surface wave line 61 is a structure in which the comb-shaped flat plates 61a and 61b periodically arranged of conductive materials are alternately combined. By properly designing the dimensions of the periodic structure, a high frequency electric field propagates between the combined comb-shaped members by applying a high frequency voltage to the open ends 62a and 62b to excite surface waves. Therefore, by providing the electrodeless discharge tube in the vicinity of the plane formed by the interdigital surface wave line 61, planar electrodeless discharge can be realized as in the case of FIG.
    7 is a perspective view of a flat spiral surface wave line 72.
    As shown in FIG. 7, the band-shaped flat plate 71 made of a conductive material has a continuous structure in a zigzag shape periodically, and when the dimensions of the periodic structure are properly designed, an electric field is generated between adjacent band-shaped flat plates. Surface waves are excited and propagate. Therefore, by providing the electrodeless discharge tube in the vicinity of the plane formed by the flat spiral surface wave line 72, the planar electrodeless discharge can be realized as in the case of FIG.
    (2nd Example)
    In the first embodiment described above, an example in which the surface wave line is constituted only of the conductive material is shown. In the present embodiment, an example of the structure in which the surface wave line is formed of the conductive material on the substrate made of the dielectric material is shown.
    Fig. 8 is a perspective view of a configuration in which the interdigital surface wave line 81 is provided on a substrate 83 made of a dielectric material.
    As shown in Fig. 8, the interdigital surface wave line 81 is a shape in which alternately arranged comb-shaped flat plates 81a and 81b of all conductive materials are alternately combined on a substrate 83 made of a dielectric material. Is installed. By properly designing the dimensions of the periodic structure, by applying a high frequency voltage to the open ends 82a and 82b, the combined comb-shaped members 81a, like the interdigital surface wave line 61 made of only the conductive material shown in FIG. A high frequency electric field propagates between 81b) and excites surface waves. Therefore, by providing the electrodeless discharge tube in the vicinity of the plane formed by the interdigital surface wave line 81, the planar electrodeless discharge can be realized as in the above embodiment.
    9 is a perspective view when the electrodeless discharge tube 12 is provided on the interdigital surface wave line 81. The center conductor (core wire) of the coaxial line 90, which is a high frequency propagation means, is electrically connected to the open end 82a and the outer conductor to the open end 82b by solder or the like, respectively. Therefore, the high frequency energy propagated by the coaxial line 90 is coupled to the interdigital surface wave line 81 to excite the surface wave.
    By employing the structure in which the surface wave line is provided on the substrate as described above, sufficient strength can be obtained even with a relatively thin surface wave line compared with the case where the surface wave line is made only of the conductor material. Therefore, it can be said that this embodiment is suitable when discharging with relatively low power.
    In the above description, the surface wave line has been described as an example of interdigital structure, but other surface wave lines can be similarly implemented. Fig. 10 is a perspective view of a configuration in which a flat spiral surface wave line is provided on a substrate made of a dielectric material. On the substrate 93 made of a dielectric material, band-shaped flat plates 91a and 91b made of a conductive material are periodically provided in a continuous shape in a rectangular shape. By properly designing the dimensions of the periodic structure, by applying a high frequency voltage to the open ends 92a and 92b, a high frequency electric field propagates between neighboring band-like plates as in a flat spiral surface wave line made of only a conductive material shown in FIG. You can click here. Therefore, by providing the electrodeless discharge tube in the vicinity of the plane formed by the flat spiral surface wave line 91, the planar electrodeless discharge can be similarly realized.
    In the structure in which the surface wave line 81 shown in the present embodiment is provided on the surface of the substrate 83 made of a dielectric material, a structure using a double-sided substrate on which the back surface of the substrate 83 is covered with a conductor may be used. In this case, the microstrip line is comprised by the conductor surface provided in the back surface of the board | substrate 83, and the part of the surface wave line 81. As shown in FIG. With such a configuration, it is possible to use design parameters of widely used microstrip lines, data of electrical lengths of wavelengths, and the like, which makes it easy to design surface wave lines.
    (Third embodiment)
    In the first and second embodiments described above, an example in which the surface wave line and the electrodeless discharge tube are configured in the form of a flat plate is shown. In this embodiment, the surface wave line is formed in a semi-cylindrical form.
    Fig. 11 shows a perspective view of an electrodeless discharge energy supply device using a semi-cylindrical corrugated surface wave line.
    As shown in FIG. 11, the semi-cylindrical surface wave line shown in 101 is semi-cylindrical in order to draw light emitted from the electrodeless discharge tube 102 in a direction perpendicular to the rotation axis 106 of the semi-cylinder. The semi-cylindrical surface wave line 101 is formed of a conductive material such as a metal such as copper or aluminum, similarly to the flat surface wave line shown in the first embodiment. The semi-cylindrical surface wave line 101 is periodically provided with wrinkles 104 made of the same conductive material on the inside of the semi-cylinder 103 at approximately vertical intervals and at regular intervals.
    In such a periodic structure of the semi-cylindrical surface wave line 101, when the high frequency energy of the desired frequency is applied by the coupling antenna 105, the axis of rotation 106 of the semi-cylinder at the upper end of the corrugation 104 and its vicinity. The dimensions of each part are designed so that the surface waves are excited and propagate in the direction parallel to the corrugation 104 and in the vertical direction (the arrow direction with the letter A in Fig. 11).
    By installing a cylindrical electrodeless discharge tube 102 filled with a discharge medium such as a rare gas or a metal in the vicinity of the center portion of the semi-cylindrical surface wave line 101, the electric wave of the surface wave generated near the upper center portion of the corrugation 104 is provided. It can cause linear electrodeless discharge.
    Radiated light generated from the electrodeless discharge tube 102 is radiated from the opening of the semicylinder 103, but by using the inside of the semicylinder 103 as a reflecting surface, the radiated light can be utilized more efficiently.
    FIG. 12 is a cross-sectional view of a semi-cylindrical surface wave line 111 further including a reflecting surface as a modification of FIG.
    As shown in FIG. 12, the semi-cylindrical surface wave line 111 forms a surface wave line from the semi-cylindrical portion 113 and the corrugation 114. Here, the inside of the semi-cylinder 113 is a first light reflecting means (part corresponding to the inner wall surface of the semi-cylinder 103 in Fig. 11) made of a light reflecting member such as polished aluminum and the second light reflecting means 115 ) The second light reflecting means 115 has a high frequency leakage preventing function. Radiated light generated from the electrodeless discharge tube 112 is led to the outside through the metal mesh 116, which is a high frequency leakage preventing means. The cross sections of the first and second light reflecting means are both integrated to form a curved shape for obtaining desired optical characteristics. The semi-cylindrical part 113 should just be substantially semi-cylindrical, For example, when the optical characteristic concentrated on a straight line is calculated | required, it is preferable that a cross section is an elliptic curve shape. Moreover, what is necessary is just to have a parabolic shape when parallel light is calculated | required.
    In this embodiment, the surface wave line is an example of using a semi-cylindrical surface wave line having an approximately semi-cylindrical shape. However, when the extraction direction of the emitted light is set in the axial direction of the cylinder, the surface wave line is not a semicylinder but is completely closed. It can be made cylindrical. In that case, what is necessary is just to provide the light transmission part for extracting a radiation light in one or both ends of a cylinder.
    In addition, in the above embodiment, a semi-cylindrical surface wave line is used as the surface wave line, but the present invention is not limited thereto. For example, the inner side of the cylindrical spiral surface wave line in which the linear members as shown in 121 of FIG. The electrodeless discharge tube may be arranged in the configuration. Accordingly, the same effects as in the above embodiment can be obtained.
    As described above, the surface wave line of the present application can be configured in various shapes and is also used as an energy supply device for generating an electrodeless discharge. In addition, conventionally known surface wave lines are used for traveling waveguides and filters for electron beam control, and many research papers and reference books have been published.
    However, the structure of the present invention which can realize a relatively uniform electrodeless discharge in a planar or linear shape by using the surface wave line as the electrodeless discharge energy supply device as described above is completely different from the method in which the conventional surface wave line is used. will be.
    In addition, it is useful to refer to the above-mentioned books on surface waves in order to design surface wave lines suitable for a desired frequency band.
    In the above-described embodiment, only the example of using the electrodeless discharge energy supply device using the surface wave line in the electrodeless discharge lamp device has been described, but the application of the electrodeless discharge energy supply device of the present invention is limited to the electrodeless discharge lamp device. no. For example, the present invention is also useful for applications requiring a wide uniform plasma, such as a semiconductor plasma processing apparatus, or for applications requiring a linear uniform long plasma such as a plasma laser.
    As can be seen from the above description, the present invention has the advantage that a more uniform discharge can be generated in a wider discharge region than the high frequency wavelength to be applied.
    As described above, according to the present invention, for example, the surface wave line excites the surface wave by high frequency, and the surface wave line is made of a conductive material having a corrugation with a periodic structure, and the surface wave line is generated in the vicinity of the surface wave line. Therefore, by using the electrodeless discharge energy supply device for supplying the energy required for the electrodeless discharge to the electrodeless discharge tube, a relatively uniform high frequency energy can be applied to the planar or linear discharge space.
    权利要求:
    Claims (16)
    [1" claim-type="Currently amended] It has a predetermined periodic structure and is provided with excitation means for exciting surface waves by a high frequency wave,
    The electrodeless discharge energy supply device, characterized in that for supplying the energy required for the electrodeless discharge by the excited surface wave.
    [2" claim-type="Currently amended] The method of claim 1,
    The excitation means is conductive and is a substantially flat surface wave line,
    And the surface wave supplied as the energy is a surface wave generated in the vicinity of the surface wave line.
    [3" claim-type="Currently amended] The method of claim 2,
    And said surface wave line is a flat-wrinkled surface wave line in which wrinkles made of conductive material are arranged substantially vertically and at predetermined intervals on a flat plate made of conductive material.
    [4" claim-type="Currently amended] The method of claim 2,
    And said surface wave line is a stub type surface wave line provided with a conductive material substantially vertically and at regular intervals on a flat plate made of a conductive material.
    [5" claim-type="Currently amended] The method of claim 1,
    The excitation means includes (1) a flat plate plate made of a dielectric material, and (2) a surface wave line formed on the substrate by using a conductive material,
    And the surface wave supplied as the energy is a surface wave generated in the vicinity of the surface wave line.
    [6" claim-type="Currently amended] The method of claim 5,
    And a surface opposite to the surface on which the surface wave line is formed is covered with a conductive material.
    [7" claim-type="Currently amended] The method according to claim 2 or 5,
    And said surface wave line is an interdigital surface wave line provided with at least two comb-shaped conductive plates crossing each other.
    [8" claim-type="Currently amended] The method according to claim 2 or 5,
    The surface wave line is an electrodeless discharge energy supply device, characterized in that the band-shaped conductive plate is a flat spiral surface wave line continuous in a zigzag form.
    [9" claim-type="Currently amended] The method of claim 1,
    The excitation means is conductive and is a substantially cylindrical or semi-cylindrical surface wave line,
    And the surface wave supplied as the energy is a surface wave generated in the vicinity of the surface wave line.
    [10" claim-type="Currently amended] The method of claim 9,
    And a lengthwise direction of the electrodeless discharge tube used to trap the electrodeless discharge is substantially parallel to an axial direction of the cylindrical surface wave line.
    [11" claim-type="Currently amended] The method according to claim 9 or 10,
    And at least a portion of the surface wave line is covered with a light transmissive member.
    [12" claim-type="Currently amended] The method according to any one of claims 9 to 11,
    And at least a portion of the inner side of the surface wave line is formed of a light reflective member.
    [13" claim-type="Currently amended] The method according to any one of claims 9 to 12,
    And the surface wave line is a semi-cylindrical surface wave line provided with conductive pleats substantially vertically and at predetermined intervals inside the conductive semi-cylindrical portion.
    [14" claim-type="Currently amended] The method according to any one of claims 9 to 12,
    And the surface wave line is a cylindrical spiral surface wave line in which a conductive linear member is spirally continuous.
    [15" claim-type="Currently amended] High frequency oscillation means for generating high frequency energy;
    High frequency propagation means for propagating the generated high frequency energy;
    An electrodeless discharge energy supply device according to any one of claims 1 to 14,
    High frequency coupling means for coupling the propagated high frequency energy to the electrodeless discharge energy supply device;
    And an electrodeless discharge lamp for discharging by surface waves generated by the electrodeless discharge energy supply device.
    [16" claim-type="Currently amended] The method of claim 15,
    A conductive high frequency leakage preventing means for preventing leakage of high frequency energy from the electrodeless discharge energy supply device,
    The high frequency leakage preventing means includes at least the electrodeless discharge energy supply device and the electrodeless discharge lamp, and at least a part of the high frequency leakage preventing means comprises an optically transmissive member. .
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    同族专利:
    公开号 | 公开日
    CN1258380A|2000-06-28|
    US6518703B1|2003-02-11|
    EP0989589A4|2001-10-10|
    WO1999048135A1|1999-09-23|
    EP0989589A1|2000-03-29|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    法律状态:
    1998-03-16|Priority to JP6501298
    1998-03-16|Priority to JP???10-65012
    1999-03-11|Application filed by 마츠시타 덴끼 산교 가부시키가이샤
    1999-03-11|Priority to PCT/JP1999/001167
    2001-02-26|Publication of KR20010012617A
    优先权:
    申请号 | 申请日 | 专利标题
    JP6501298|1998-03-16|
    JP???10-65012|1998-03-16|
    PCT/JP1999/001167|WO1999048135A1|1998-03-16|1999-03-11|Electrodeless discharge energy supply apparatus and electrodeless discharge lamp device|
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